Next-Gen Surface Analysis for Ultrathin Functional Materials
Advanced nanoelectronics and quantum devices rely on ultrathin oxides and engineered interfaces whose chemical composition, stoichiometry and thickness must be controlled with sub-nanometer precision. LETI is installing the first 300-mm multi-energy XPS–HAXPES tool with angle-resolved capability, enabling quasi in situ chemical metrology from deposition to characterization.
This PhD will develop quantitative, multi-energy and angle-resolved XPS/HAXPES methodologies for ultrathin oxides and oxynitrides, validate measurement accuracy, and establish robust protocols for quasi in situ transfer of sensitive layers. Applications include advanced CMOS stacks and quantum Josephson junctions, where sub-2 nm AlOx barriers critically determine device performance.
The project directly supports the development of next-generation quantum technologies, advanced photonics and energy-efficient microelectronics by improving the reliability and stability of nanoscale materials. The work will be carried out within a strong multi-partner framework.
Development of a 3D gel dosimetry method for quality control of radiotherapy treatment plans using ultra-high dose rate charged particle beams (FLASH)
Ultra-high-dose-rate FLASH radiotherapy is one of the most promising innovations of the last decade in radiation oncology. It has the potential to eradicate radioresistant tumours and reduce unwanted side effects, that in turn increases cure rates and improves patient quality of life. However, dosimetry infrastructure is lagging behind this clinical and technological advance, with current dosimeters no longer suitable and none of those under development achieving consensus.
The optically read dosimetric gel developed at LNHB-MD (CEA Paris-Saclay) is a promising candidate, as photon beam measurements have shown a linear response over a wide dose range (0.25 - 10 Gy) as well as independence in energy (6 - 20 MV) and dose rate (1 - 6 Gy/min). In addition, this water-equivalent dosimeter has the unique ability to provide three-dimensional measurements with high spatial resolution (< 1 mm) with an associated combined uncertainty of approximately 2% (k = 1). This dosimetry method has been validated for quality control of conventional radiotherapy treatment plans but has never been tested with FLASH beams.
This doctoral project aims to develop a 3D gel dosimetry method suitable for FLASH radiotherapy delivered by charged particle beams: (1) conventional energy electrons (= 10 MeV), (2) very high energy electrons (VHEE = 50 MeV), and (3) protons (= 100 MeV). For each of these types of beams, available at the Institut Curie in Orsay and also at Gustave Roussy in Villejuif, the validation of the dose distribution measured by gel will be carried out by comparison with measurements using other dosimeters (e.g. diamond, alanine) and Monte Carlo simulations.
This study will make a significant contribution to improving patient safety, optimising treatment efficacy and the future integration of FLASH radiotherapy into clinical practice.
Reducing damage and loading in high aspect ratio III-V etching
The growing demand for III-V semiconductors in high-efficiency photovoltaics, quantum photonics, and advanced imaging technologies requires innovative and cost-effective fabrication methods. This PhD project focuses on developing plasma etching processes for In-based III-V semiconductors to produce high aspect ratio (HAR) structures on large wafers from 100 to 300 mm. The research addresses two key challenges: understanding how etching process windows evolve with material loading and process conditions (physical vs. chemical dominance), and minimizing electrical degradation induced by HAR etching, which is critical for device performance.
These challenges are fundamentally linked to the low volatility of In-based etch byproducts, the need to balance kinetic and thermal energy inputs to enhance etch selectivity, and the management of etch loading effects for large-scale production. The experimental approach will leverage CEA-Leti's state-of-the-art facilities, including the Photonics platform for 2–4-inch wafer processing, which enables masking strategies (hard mask deposition, photolithography) and low-temperature (150°C) etching.
Characterization will involve SEM for etch profile analysis, XPS for surface composition, and TEM-EDX for sidewall quality assessment. Damage evaluation will be performed using near-infrared photoluminescence decay to measure minority carrier lifetime and identify recombination centers. The work aims to develop optimized HAR etching processes (aspect ratios >10, critical dimensions <1 µm) for In-based III-V materials, investigate pulsed plasma techniques to reduce etch-induced damage, and provide insights into defect formation mechanisms to guide process optimization for industrial applications.
Introduction of innovative materials for sub-10nm contact realization
As part of the FAMES project and the European ChipACT initiative, which aim to ensure France’s and Europe’s sovereignty and competitiveness in the field of electronic nano-components, CEA-LETI has launched the design of new FD-SOI chips. Among the various modules being developed, the fabrication of electrical contacts is one of the most critical modules in the success of advanced node development.
For sub-10 nm node, the contact realization is facing a lot of challenges like punchthrough (due to low etch selectivity during contact etching), voids during metal deposition, self-alignment, and parasitic capacitance. New breakthrough approach has recently been proposed consisting in the deposition of new dielectric films with chemical gradient. This thesis focuses on the development (deposition an etching processes) of new gradient compounds incorporated into SiO2 to address the current issues.
Advanced characterization of defects generated by technological processes for high-performance infrared imaging
This thesis falls within the field of cooled infrared detectors. The CEA-LETI-MINATEC Infrared Laboratory specializes in the design and manufacture of infrared camera prototypes used in defense, astronomy, environmental monitoring, and satellite meteorology.
In this context of high-performance imaging, it is crucial to ensure optimal detector quality. However, manufacturing processes can introduce defects that can degrade sensor performance. Understanding and controlling these defects is essential to increase reliability and optimize processes.
The objective of the thesis is to identify and precisely characterize these defects using cutting-edge techniques, rarely combined, such as Laue microdiffraction and FIB-SEM nanotomography, enabling structural analysis at different scales. By linking the nature and origin of defects to manufacturing processes and quantifying their impact on performance, the doctoral student will contribute directly to improving the reliability and efficiency of next-generation infrared sensors.
The doctoral student will join a team covering the entire detector manufacturing chain and will actively participate in the development (LETI clean room) and structural characterization (CEA-Grenoble platform, advanced techniques) of samples. He/she will also be involved in electro-optical characterization in partnership with the Cooled Infrared Imaging Laboratory (LIR), which specializes in detailed analysis of active materials at cryogenic temperatures.
Advanced electrode materials by ALD for ionic devices
This work aims to develop Advanced ultrathin cunductive layers (<10nm) by ALD (Atomic Layer Deposition)for électrodes use(resistivity 100). The other challenge aims to reduce the ALD-based electrode layer thickness less than 5nm while still maintaining the advanced electric properties (resistivity in the mOhm range).
This work covers multiple aspects including inter alia ALD process, ALD precursors, Elementary characterization of intrinsec properties (physico-chemical, morphological and electrochemical) as well as integration on short loop 3D devices.
Superconducting silicide contacts on hyperdoped silicon by nanosecond pulsed-laser annealing
In the race towards building a quantum computer, there is a deep interest in fabricating devices based on the robust and scalable silicon FD-SOI technology. One example is the Josephson Field Effect Transistor (JoFET) whose operability relies on the high transparency of the interface between the superconducting source/drain regions and the semiconducting channel. Such transparency could be improved by doping the source/drain regions, and hence lowering the Schottky barrier height at the superconductor/semiconductor interfaces.
This PhD aims at developing highly transparent superconducting silicide contacts on a 300 mm production line using Nanosecond Pulsed Laser Annealing (NPLA). NPLA will play a key role for reaching extremely high doping concentrations in silicon [1,2], then forming the superconducting silicides (CoSi2, V3Si) with minimal thermal budget and related dopant deactivation. A particular focus will be devoted on the stresses during silicide formation and their impact on the superconducting critical temperature. Also, the distribution of dopants will be assessed by Atom Probe Tomography (APT), an advanced 3D imaging technique capable of imaging the distribution of dopants at the atomic scale [3]. Finally, electrical measurements on fabricated junctions and transistors will be carried out at low temperature (< 1 K) in order to evaluate the transparency of the superconducting contacts.
New generation of organic susbtrates for power conversion
Recent advances in electric motors and associated power electronics have led to a significant increase in power density requirements. This increase in power density means smaller heat exchange surfaces, which amplifies the challenges associated with dissipating the heat generated by power electronics components during operation. In fact, the lack of adequate heat dissipation causes electronic components to overheat, impacting their performance, durability, and reliability. Other issues related to cost, repairability, and thermomechanical constraints call into question traditional ceramic-based insulating thermal interfaces. It is therefore imperative to develop a new generation of heat-dissipating materials that take the system environment into account.
The objective of this thesis is to replace the ceramic substrate in power module systems, whose main role is to act as the system's dielectric layer, with a thermally conductive organic matrix composite. The current substrate has well-known limitations (fragility, poor interface, cycling limit, cost). The organic substrate must have the highest possible thermal conductivity (>3 W/m.k) in order to dissipate the heat emitted properly, while also being electrically insulating with a breakdown voltage of approximately 3kV/mm. It must also have a coefficient of thermal expansion (CTE) compatible with that of copper in order to eliminate delamination phenomena during the cycling undergone by the device during its lifetime. The innovation of the doctoral student's work will lie in the use of highly thermally conductive (nano)fillers that will be electrically insulated (insulating coating) and can be oriented in a polymer resin under external stimulus.
The development of the electrical insulating shell on the thermally conductive core will be carried out using the sol-gel method. The synthesis will be controlled and optimized in order to correlate the homogeneity and thickness of the coating with the dielectric and thermal performance of the (nano)composite. The charge/matrix interface (a potential source of phonon diffraction) will also be studied. A second part will focus on grafting magnetic nanoparticles (MNPs) onto thermally conductive (nano)fillers. Commercial MNPs will be evaluated (depending on requirements, grades synthesized in the laboratory may also be evaluated). The (nano)composites must have rheology compatible with pressing and/or injection processes.
Novel architecture and signal processing for mobile optical telecommunications
Free-Space Optical Communications (FSO) rely on transmitting data via light between two distant points, eliminating the need for fibers or cables. This approach is particularly valuable when wired connections are impractical or prohibitively expensive.
However, these links are highly susceptible to atmospheric conditions—fog, rain, dust, and thermal turbulence—which attenuate or distort the light beam, significantly degrading communication quality. Current solutions remain costly and limited, both in terms of optical compensation hardware and signal processing algorithms.
Within this framework, the thesis aims to design high-performance, robust mobile optical links capable of adapting to dynamic and disturbed environments. The study will focus on leveraging Silicon-based Optical Phased Arrays (OPAs)—a technology derived from low-cost LiDAR systems—offering a promising path toward compact, integrated, and cost-effective architectures.
The primary focus of the research will be developing advanced algorithmic approaches for signal processing and compensation. The PhD candidate will be tasked with designing a dedicated simulation environment to evaluate and validate architectural choices and algorithmic strategies before practical experimentation.
The overarching goal is to propose an integrated, flexible, and reliable architecture that ensures uninterrupted optical communication in motion, with potential applications in aerospace, space, and terrestrial domains.
Multipath-based Cooperative Simultaneous Localization & Mapping through Machine Learning
The goal of this PhD is to explore the potential of machine learning (ML) tools for simultaneous localization and mapping (SLAM) applications, while leveraging multipath radio signals between cooperative wireless devices.
The idea is to identify characteristic features of the propagation channels observed over multiple radio links, so as to jointly determine the relative positions of the mobile radio devices, as well as those of scattering objects present in their vicinity. Such radio features typically rely on the arrival times of multipath echos of the transmitted signals. The envisaged approach is expected to benefit from multipath correlation as the radio devices are moving, as well as from spatial diversity and information redundancy through multi-device cooperation. The developed solution will be evaluated on both real measurements collected with integrated Ultra Wideband devices in a reference indoor environment, and synthetic data generated with a Ray-Tracing simulator.
Possible applications of this research concern group navigation in complex and/or unknown environments (incl. fleets of drones or robots, firefighters…).