Introduction of innovative materials for sub-10nm contact realization
As part of the FAMES project and the European ChipACT initiative, which aim to ensure France’s and Europe’s sovereignty and competitiveness in the field of electronic nano-components, CEA-LETI has launched the design of new FD-SOI chips. Among the various modules being developed, the fabrication of electrical contacts is one of the most critical modules in the success of advanced node development.
For sub-10 nm node, the contact realization is facing a lot of challenges like punchthrough (due to low etch selectivity during contact etching), voids during metal deposition, self-alignment, and parasitic capacitance. New breakthrough approach has recently been proposed consisting in the deposition of new dielectric films with chemical gradient. This thesis focuses on the development (deposition an etching processes) of new gradient compounds incorporated into SiO2 to address the current issues.
Advanced characterization of defects generated by technological processes for high-performance infrared imaging
This thesis falls within the field of cooled infrared detectors. The CEA-LETI-MINATEC Infrared Laboratory specializes in the design and manufacture of infrared camera prototypes used in defense, astronomy, environmental monitoring, and satellite meteorology.
In this context of high-performance imaging, it is crucial to ensure optimal detector quality. However, manufacturing processes can introduce defects that can degrade sensor performance. Understanding and controlling these defects is essential to increase reliability and optimize processes.
The objective of the thesis is to identify and precisely characterize these defects using cutting-edge techniques, rarely combined, such as Laue microdiffraction and FIB-SEM nanotomography, enabling structural analysis at different scales. By linking the nature and origin of defects to manufacturing processes and quantifying their impact on performance, the doctoral student will contribute directly to improving the reliability and efficiency of next-generation infrared sensors.
The doctoral student will join a team covering the entire detector manufacturing chain and will actively participate in the development (LETI clean room) and structural characterization (CEA-Grenoble platform, advanced techniques) of samples. He/she will also be involved in electro-optical characterization in partnership with the Cooled Infrared Imaging Laboratory (LIR), which specializes in detailed analysis of active materials at cryogenic temperatures.
Advanced electrode materials by ALD for ionic devices
This work aims to develop Advanced ultrathin cunductive layers (<10nm) by ALD (Atomic Layer Deposition)for électrodes use(resistivity 100). The other challenge aims to reduce the ALD-based electrode layer thickness less than 5nm while still maintaining the advanced electric properties (resistivity in the mOhm range).
This work covers multiple aspects including inter alia ALD process, ALD precursors, Elementary characterization of intrinsec properties (physico-chemical, morphological and electrochemical) as well as integration on short loop 3D devices.
Superconducting silicide contacts on hyperdoped silicon by nanosecond pulsed-laser annealing
In the race towards building a quantum computer, there is a deep interest in fabricating devices based on the robust and scalable silicon FD-SOI technology. One example is the Josephson Field Effect Transistor (JoFET) whose operability relies on the high transparency of the interface between the superconducting source/drain regions and the semiconducting channel. Such transparency could be improved by doping the source/drain regions, and hence lowering the Schottky barrier height at the superconductor/semiconductor interfaces.
This PhD aims at developing highly transparent superconducting silicide contacts on a 300 mm production line using Nanosecond Pulsed Laser Annealing (NPLA). NPLA will play a key role for reaching extremely high doping concentrations in silicon [1,2], then forming the superconducting silicides (CoSi2, V3Si) with minimal thermal budget and related dopant deactivation. A particular focus will be devoted on the stresses during silicide formation and their impact on the superconducting critical temperature. Also, the distribution of dopants will be assessed by Atom Probe Tomography (APT), an advanced 3D imaging technique capable of imaging the distribution of dopants at the atomic scale [3]. Finally, electrical measurements on fabricated junctions and transistors will be carried out at low temperature (< 1 K) in order to evaluate the transparency of the superconducting contacts.
New generation of organic susbtrates for power conversion
Recent advances in electric motors and associated power electronics have led to a significant increase in power density requirements. This increase in power density means smaller heat exchange surfaces, which amplifies the challenges associated with dissipating the heat generated by power electronics components during operation. In fact, the lack of adequate heat dissipation causes electronic components to overheat, impacting their performance, durability, and reliability. Other issues related to cost, repairability, and thermomechanical constraints call into question traditional ceramic-based insulating thermal interfaces. It is therefore imperative to develop a new generation of heat-dissipating materials that take the system environment into account.
The objective of this thesis is to replace the ceramic substrate in power module systems, whose main role is to act as the system's dielectric layer, with a thermally conductive organic matrix composite. The current substrate has well-known limitations (fragility, poor interface, cycling limit, cost). The organic substrate must have the highest possible thermal conductivity (>3 W/m.k) in order to dissipate the heat emitted properly, while also being electrically insulating with a breakdown voltage of approximately 3kV/mm. It must also have a coefficient of thermal expansion (CTE) compatible with that of copper in order to eliminate delamination phenomena during the cycling undergone by the device during its lifetime. The innovation of the doctoral student's work will lie in the use of highly thermally conductive (nano)fillers that will be electrically insulated (insulating coating) and can be oriented in a polymer resin under external stimulus.
The development of the electrical insulating shell on the thermally conductive core will be carried out using the sol-gel method. The synthesis will be controlled and optimized in order to correlate the homogeneity and thickness of the coating with the dielectric and thermal performance of the (nano)composite. The charge/matrix interface (a potential source of phonon diffraction) will also be studied. A second part will focus on grafting magnetic nanoparticles (MNPs) onto thermally conductive (nano)fillers. Commercial MNPs will be evaluated (depending on requirements, grades synthesized in the laboratory may also be evaluated). The (nano)composites must have rheology compatible with pressing and/or injection processes.
Novel architecture and signal processing for mobile optical telecommunications
Free-Space Optical Communications (FSO) rely on transmitting data via light between two distant points, eliminating the need for fibers or cables. This approach is particularly valuable when wired connections are impractical or prohibitively expensive.
However, these links are highly susceptible to atmospheric conditions—fog, rain, dust, and thermal turbulence—which attenuate or distort the light beam, significantly degrading communication quality. Current solutions remain costly and limited, both in terms of optical compensation hardware and signal processing algorithms.
Within this framework, the thesis aims to design high-performance, robust mobile optical links capable of adapting to dynamic and disturbed environments. The study will focus on leveraging Silicon-based Optical Phased Arrays (OPAs)—a technology derived from low-cost LiDAR systems—offering a promising path toward compact, integrated, and cost-effective architectures.
The primary focus of the research will be developing advanced algorithmic approaches for signal processing and compensation. The PhD candidate will be tasked with designing a dedicated simulation environment to evaluate and validate architectural choices and algorithmic strategies before practical experimentation.
The overarching goal is to propose an integrated, flexible, and reliable architecture that ensures uninterrupted optical communication in motion, with potential applications in aerospace, space, and terrestrial domains.
Multipath-based Cooperative Simultaneous Localization & Mapping through Machine Learning
The goal of this PhD is to explore the potential of machine learning (ML) tools for simultaneous localization and mapping (SLAM) applications, while leveraging multipath radio signals between cooperative wireless devices.
The idea is to identify characteristic features of the propagation channels observed over multiple radio links, so as to jointly determine the relative positions of the mobile radio devices, as well as those of scattering objects present in their vicinity. Such radio features typically rely on the arrival times of multipath echos of the transmitted signals. The envisaged approach is expected to benefit from multipath correlation as the radio devices are moving, as well as from spatial diversity and information redundancy through multi-device cooperation. The developed solution will be evaluated on both real measurements collected with integrated Ultra Wideband devices in a reference indoor environment, and synthetic data generated with a Ray-Tracing simulator.
Possible applications of this research concern group navigation in complex and/or unknown environments (incl. fleets of drones or robots, firefighters…).
Integrated optical functions on microbolometer focal planes for uncooled infrared imaging
Thermal infrared imaging (wavelengths 8-14 µm) is a growing field, particularly in industry, transportation, and environment. It relies on a detection technology, microbolometers, for which CEA-Leti is at the forefront of the global state of the art. Integrating advanced optical functions directly onto the detectors is a very promising approach for improving performance, compactness, and cost in future infrared cameras.
The optical functions under consideration include spectral filtering, polarimetry, wavefront correction, and more. Some aim to enrich the image with information essential for applications such as absolute thermography (temperature and emissivity measurement), identification for automated scene interpretation (machine vision), gas detection, and others.
The proposed work will include the design, fabrication, and electro-optical characterization of functionalized microbolometer arrays. Using 3D electromagnetic simulation tools, the design of these optical functions will take into account the compatibility with our microbolometer technologies and the capabilities of our microfabrication facilities. Fabrication will take place in the CEA-Leti cleanrooms by dedicated personnel, but the candidate will participate in defining and monitoring the work. Finally, optical and electro-optical characterizations will be performed in our laboratory, if necessary with the development of dedicated characterization benches.
AI Enhanced MBSE framework for joint safety and security analysis of critical systems
Critical systems must simultaneously meet the requirements of both Safety (preventing unintentional failures that could lead to damage) and Security (protecting against malicious attacks). Traditionally, these two areas are treated separately, whereas they are interdependent: An attack (Security) can trigger a failure (Safety), and a functional flaw can be exploited as an attack vector.
MBSE approaches enable rigorous system modeling, but they don't always capture the explicit links between Safety [1] and Security [2]; risk analyses are manual, time-consuming and error-prone. The complexity of modern systems makes it necessary to automate the evaluation of Safety-Security trade-offs.
Joint safety/security MBSE modeling has been widely addressed in several research works such as [3], [4] and [5]. The scientific challenge of this thesis is to use AI to automate and improve the quality of analyses. What type of AI should we use for each analysis step? How can we detect conflicts between safety and security requirements? What are the criteria for assessing the contribution of AI to joint safety/security analysis?
CORTEX: Container Orchestration for Real-Time, Embedded/edge, miXed-critical applications
This PhD proposal will develop a container orchestration scheme for real-time applications, deployed on a continuum of heterogeneous computing resources in the embedded-edge-cloud space, with a specific focus on applications that require real-time guarantees.
Applications, from autonomous vehicles, environment monitoring, or industrial automation, applications traditionally require high predictability with real-time guarantees, but they increasingly ask for more runtime flexibility as well as a minimization of their overall environmental footprint.
For these applications, a novel adaptive runtime strategy is required that can optimize dynamically at runtime the deployment of software payloads on hardware nodes, with a mixed-critical objective that combines real-time guarantees with the minimization of the environmental footprint.