SCO&FE ALD materials for FeFET transistors
Ferroelectric Field Effect Transistors FeFET is a valuable high-density memory component suitable for 3D DRAM. FeFET concept combines oxide semiconductors SCO as canal material and ferroelectric metal oxides FE as transistor gate [2, 3]. Atomic layer deposition ALD of SCO and FE materials at ultrathin thickness level (<10 nm) and low temperature (10 cm2.Vs); ultrathin (<5nm) and ultra-conformal (aspect ratio 1:10). The PhD student will beneficiate from the rich technical environment of the 300/200mm CEA-LETI clean-room and the nano-characterization platform (physico-chemical, structural and microscopy analysis, electrical measurements).
The developments will focus on the following items:
1-Comparison of SCO layers (IGZO Indium Gallium Zinc Oxide) fabricated using ALD and PVD techniques: implementation of adapted mesurements techniques and test vehicles
2-Intrinsec and electrical characterization of ALD-SCO (IWO, IGZO, InO) and ALD-EF (HZO) layers: stoichiometry, structure, resistivity, mobility….
3-Co-integration of ALD-SCO and ALD-FE layers for vertical and horizontal 3D FeFET structures
[1]10.35848/1347-4065/ac3d0e
[2]https://doi.org/10.1109/TED.2023.3242633
[3]https://doi.org/10.1021/acs.chemmater.3c02223
Direct metal etch mechanisms study for the BEOL of ultimate SOI nodes
The topic fits into the deployment of silicon technologies at the European level (European chips act), led by CEA-Leti. The focus will be on providing advanced technological building blocks for electrical routing (Back End of Line) of logic and analog devices. The development of increasingly high-performance circuits requires interconnections with more aggressive dimensions. The use of traditional routing materials such as copper is therefore being questioned, as is the conventional back-end of line (BEOL) architecture. This thesis topic will address a breakthrough approach, necessary to achieve these ultimate dimensions.
The objective of this PhD is to develop a BEOL technological building block for the advanced SOI (Silicon on Insulator) nodes through a direct metal etching approach. After a preliminary simulation of the electrical properties of interconnections made with different metals, the work will consist in proposing and implementing an innovative integration. In the first phase, the task will be to determine the design of the electrical test structures and establish an integration scheme. In the second phase, the research work will focus on studying the direct etching of the selected metal using sustainable processes while maintaining the performance of both the processes and the final device. The candidate will be able to rely on the eco-innovation team to perform a comparative life cycle analysis (LCA) of this building block.
The PhD contract is for a duration of 3 years and the research work will take place in the clean rooms of CEA-Leti. To successfully carry out this study, the candidate will have access to state-of-the-art equipment and a cutting-edge work environment.
Laser Fault Injection Physical Modelling in FD-SOI technologies: toward security at standard cells level on FD-SOI 10 nm node
The cybersecurity of our infrastructures is at the very heart in the digital transition on-going, and security must be ensured throughout the entire chain. At the root of trust lies the hardware, integrated circuits providing essential functions for the integrity, confidentiality and availability of processed information.
But hardware is vulnerable to physical attacks, and defence has to be organised. Among these attacks, some are more tightly coupled to the physical characteristics of the silicon technologies. An attack using a pulsed laser in the near infrared is one of them and is the most powerful in terms of accuracy and repeatability. Components must therefore be protected against this threat.
As the FD-SOI is now widely deployed in embedded systems (health, automotive, connectivity, banking, smart industry, identity, etc.) where security is required. FD-SOI technologies have promising security properties as being studied as less sensitive to a laser fault attack. But while the effect of a laser fault attack in traditional bulk technologies is well handled, deeper studies on the sensitivity of FD-SOI technologies has to be done in order to reach a comprehensive model. Indeed, the path to security in hardware comes with the modelling of the vulnerabilities, at the transistor level and extend it up to the standard cells level (inverter, NAND, NOR, Flip-Flop) and SRAM. First a TCAD simulation will be used for a deeper investigation on the effect of a laser pulse on a FD-SOI transistor. A compact model of an FD-SOI transistor under laser pulse will be deduced from this physical modelling phase. This compact model will then be injected into various standard cell designs, for two different objectives: a/ to bring the modelling of the effect of a laser shot to the level of standard cell design (where the analog behaviour of a photocurrent becomes digital) b/ to propose standard cell designs in FD-SOI 10nm technology, intrinsically secure against laser pulse injection. Experimental data (existing and generated by the PhD student) will be used to validate the models at different stages (transistor, standard cells and more complex circuits on ASIC).
Ce sujet de thèse est interdisciplinaire, entre conception microélectronique, simulation TCAD et simulation SPICE, tests de sécurité des systèmes embarqués. Le candidat sera en contact/encadré avec deux équipes de recherche; conception microélectronique , simulation TCAD et sécurité des systèmes embarqués.
Contacts: romain.wacquez@cea.fr, jean-frederic.christmann@cea.fr, sebastien.martinie@cea.fr
Super-gain miniature antennas with circular polarization and electronic beam steering
Antenna radiation control in terms of shape and polarization is a key element for future communication systems. Directive compact antennas offer new opportunities for wireless applications in terms of spatial selectivity and filtering. This leads to a reduction in electromagnetic pollution by mitigating interferences with other communication systems and reducing battery consumption in compact smart devices (IoT), while enabling also new use modes. However, the conventional techniques for enhancing the directivity often lead to a significant increase of the antenna size. Consequently, the integration of directional antennas in small wireless devices is limited. This difficulty is particularly critical for the frequency bands below 3 GHz if object dimensions are limited to a few centimeters. Super directive/gain compact antennas with beam-steering capabilities and operating on a wideband or on multi-bands are an innovative and attractive solution for the development of new applications in the field of the connected objects. In fact, the possibility to control electronically the antenna radiation properties is an important characteristic for the development of the future generation and smart communication systems. CEA Leti has a very strong expertise in the domain of superdirective antennas demonstrating the potentials of the use of ultra-compact parasitic antenna arrays. This PhD project will take place at CEA Leti Grenoble in the antennas and propagation laboratory (LAPCI). The main objectives of this work are: i) contribution to development of numerical tools for the design and optimization of superdirective compact arrays with beam-steering capabilities; ii) the study of new elementary sources for compact antenna arrays; iii) the realization and experimental characterization of a supergain compact array with circular polarization and beam-steering capabilities. This work will combine theoretical studies and model developments, antenna design using 3D electromagnetic software, prototyping and experimentations.
High-throughput experimentation applied to battery materials
High throughput screening, which has been used for many years in the pharmaceutical field, is emerging as an effective method for accelerating materials discovery and as a new tool for elucidating composition-structure-functional property relationships. It is based on the rapid combinatorial synthesis of a large number of samples of different compositions, combined with rapid and automated physico-chemical characterisation using a variety of techniques. It is usefully complemented by appropriate data processing.
Such a methodology, adapted to lithium battery materials, has recently been developed at CEA Tech. It is based, on the one hand, on the combinatorial synthesis of materials synthesised in the form of thin films by magnetron cathode co-sputtering and, on the other hand, on the mapping of the thickness (profilometry), elemental composition (EDS, LIBS), structure (µ-DRX, Raman) and electr(ochim)ical properties of libraries of materials (~100) deposited on a wafer. In the first phase, the main tools were established through the study of Li(Si,P)ON amorphous solid electrolytes for solid state batteries.
The aim of this thesis is to further develop the method so as to enable the study of new classes of battery materials: crystalline electrolytes or glass-ceramics for Li or Na, oxide, sulphides or metal alloys electrode materials. In particular, this will involve taking advantage of our new equipment for mapping physical-chemical properties (X-ray µ-diffraction, Laser-Induced Breakdown Spectroscopy) and establishing a methodology for manufacturing and characterising libraries of thin-film all-solid-state batteries. This tool will be used to establish correlations between process parameters, composition, structure, and electrochemical properties of systems of interest. Part of this work may also involve data processing and programming the characterisation tools.
This work will be carried out in collaboration with researchers from the ICMCB and the CENBG
Study of grayscale photoresists and lithography process optimizations for submicron optical applications
Grayscale lithography process has been used for several years to obtain complex tridimensional structures on semiconductors substrates. This process is particularly adapted for optical and opto-electronics applications.
CEA-LETI has developed a strong expertise on I-line (365nm) grayscale lithography, and is now willing to expand its capabilities and explore grayscale process with DUV (248nm and 193nm) lithography. The objective is to be able to obtain complex 3D structures with critical dimensions less than 1µm.
This PhD work will focus on acquiring a better understanding of the chemical and physical phenomena involved in grayscale photoresists, allowing the optimization of lithography processes. This work will also help with the development of etching processes and new optical models for mask designs.
You will join the lithography team of CEA-LETI, and you will exchange as well with other teams working on this topic (etching, optical simulation). You will have access to a wide range of state of the art equipments installed in LETIs cleanrooms, as well as a world class nanocharacterization platform (PFNC).
Development of a multiphysics stochastic modelling for liquid scintillation measurements
The Bureau international des poids et mesures (BIPM) is developing a new transfer instrument named the "Extension of the International Reference System" (ESIR), based on the Triple-to-Double Coincidence Ratio (TDCR) method of liquid scintillation counting with a specific instrumentation comprising three photomultipliers. The aim is to enable international comparisons of pure beta radionuclides, certain radionuclides that decay by electron capture, and to facilitate international comparisons of alpha emitting radionuclides.
The TDCR method is a primary activity measurement technique used in national laboratories. For the activity determination, its application relies on the construction of a model of light emission requiring knowledge of the energy deposited in the liquid scintillator. Depending on the decay scheme, the combination of different deposited energies can be complex, particularly when it results from electronic rearrangement following electron capture decay. The stochastic approach of the RCTD model is applied by randomly sampling the different ionizing radiation emissions following a radioactive decay. The recent addition of modules for automatically reading nuclear data (such as those available in the Table des Radionucléides) in radiation/matter simulation codes (PENELOPE, GEANT4), means that all possible combinations can be rigorously taken into account. The stochastic approach makes it possible to consider the actual energy deposited in the liquid scintillation vial, taking into account interactions in the instrumentation as a whole.
The aim of this thesis is to develop a multiphysics stochastic approach using the GEANT4 radiation/matter simulation code, to be applied in particular to the BIPM's ESIR system. The choice of the Geant4 code offers the possibility of integrating the transport of ionizing particles and scintillation photons. This development is of great interest for radioactivity metrology, with the aim of ensuring metrological traceability to a larger number of radionuclides with the BIPM's ESIR system. The thesis will be carried out in collaboration with the Commissariat à l'Energie Atomique et aux Energies Alternatives (CEA), which already has experience in developing a stochastic model with the GEANT4 code for its instrumentation dedicated to the TDCR method at the Laboratoire National Henri Becquerel (LNE-LNHB).
Dynamic Assurance Cases for Autonomous Adaptive Systems
Providing assurances that autonomous systems will operate in a safe and secure manner is a prerequisite for their deployment in mission-critical and safety-critical application domains. Typically, assurances are provided in the form of assurance cases, which are auditable and reasoned arguments that a high-level claim (usually concerning safety or other critical properties) is satisfied given a set of evidence concerning the context, design, and implementation of a system. Assurance case development is traditionally an analytic activity, which is carried out off-line prior to system deployment and its validity relies on assumptions/predictions about system behavior (including its interactions with its environment). However, it has been argued that this is not a viable approach for autonomous systems that learn and adapt in operation. The proposed PhD will address the limitations of existing assurance approaches by proposing a new class of security-informed safety assurance techniques that are continually assessing and evolving the safety reasoning, concurrently with the system, to provide through-life safety assurance. That is, safety assurance will be provided not only during initial development and deployment, but also at runtime based on operational data.
Development of a Multilayer Encapsulation System for the Production of Core-Shell Microcapsules Suitable for Organoid Growth
Every year, 20 million people worldwide are diagnosed with cancer, with 9.7 million succumbing to the disease (Kocarnik et al., 2021). Personalized treatment could significantly reduce the number of deaths. This thesis addresses this challenge by proposing the development of organoids derived from patient biopsies to optimize treatments.
The bioproduction of encapsulated cells in biopolymers is a rapidly growing field, with applications in personalized medicine, research, drug screening, cell therapies, and bioengineering. This thesis aims to contribute to these fields by focusing on the multilayer encapsulation of cells in biopolymers with a wide range of viscosities.
The inner layer (core) provides an optimal environment for the maturation and survival of cells or organoids, while the outer layer (shell) ensures mechanical protection and acts as a filtering barrier against pathogens.
This new thesis aims to design, develop, and study—both analytically and numerically—the architecture of a dual-compartment nozzle for the high-frequency production of monodisperse core-shell capsules. It builds upon a previous thesis completed in 2023, which focused on the detailed characterization and development of a predictive model for the generation of single-layer microcapsules using centrifugal force alone.
The formation and ejection mechanisms of multilayer capsules are complex, involving the rheological properties of biopolymers, centrifugal force, surface tension, and interfacial dynamics. The nozzle architecture must account for these properties.
The first part of this thesis will focus on understanding the multilayer formation and ejection mechanisms of microcapsules as a function of nozzle geometry. This will allow the prediction and control of capsule formation based on the rheological properties of the biopolymers. The second part will involve developing an automated system for the aseptic production of capsules. Finally, biological validation will assess the functionality and reliability of the developed technology.
To achieve the objectives of this study, the candidate will first conduct analytical and numerical studies, design the ejection nozzles, and leverage the laboratory's expertise for their fabrication. Fluidic tests on prototypes will help optimize the design, leading to the development and testing of a fully operational microcapsule production system.
The ideal candidate will have a background in physics, engineering, and fluid mechanics, with a strong inclination for experimental approaches. Prior experience in microfluidics or biology would be a valuable asset.
Sub-10nm CMOS performances assessment by co-optimization of lithography and design
While developing and introducing new technologies (ex. FDSOI 10nm CMOS), design rules (DRM) are the guidelines used to ensure that a chip design can be reliably fabricated. These rules govern the physical dimensions and spacing of various features used by the designer in the chip layout. They translate both device electrical constraints and manufacturing processes constraints. Among them, lithography and patterning processes are critical step in defining the intricate structures and features on a semiconductor wafer. The most efficient design rules can only be obtained from a co-optimization merging design and lithography constraints.
The objective of this research work is to demonstrate that the use of a digital lithography twin can improve the performance of CMOS by co-optimization of design and lithography (DTCO).
Starting from specific use cases for FDSOI 10nm CMOS technologies, and using advanced lithography simulation tools, the candidate would :
- Develop novel characterization methods to assess lithography process capabilities (hotspot prediction).
- Assess design rules with respect to the lithography process capabilities.
- Quantify, though design rules, lithography impact on device performances.
- Identify significant both process and design limitations and propose paths to challenge them.
As PhD student of CEA-Leti, you will join a technology research institute dedicated to micro and nanotechnologies, within a dynamic and international research environment. You will join the Computational Patterning Laboratory with strong connections with integrated circuit design experts of CEA-Leti. You will benefit from the exceptional facilities of the institute's 300mm clean room and from state-of-the art lithography software tools.
You will be encouraged to publish your work and participate to international conferences and workshops.