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Thesis
Home   /   Post Doctorat   /   Lead free piezoelectric thin films for MEMS

Lead free piezoelectric thin films for MEMS

Emerging materials and processes for nanotechnologies and microelectronics Engineering sciences Materials and applications Technological challenges

Abstract

As part of the TILPAC project (ANR grant), you will work on the development of lead-free piezoelectric materials for MEMS actuator applications. The materials deposited in thin layers will be integrated into test vehicles in order to evaluate their properties (electrical, ferroelectric, piezoelectric) and compare them to those of the reference material, PZT, with a view to integration into devices at industrial scale. Particular attention will also be paid to environmental impact aspects.

Laboratory

Département Composants Silicium (LETI)
Service Intégrations et Technologies pour les conversions d'énergies
Laboratoire des technologies d'Intégration des Capteurs et Actionneurs
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