Selective removal of metal alloy for advanced silicidation applied to sub-20nm CMOS transistors
CMOS transistor performances depend on electrical contact resistivity reduction. Thus, self aligned silicidation (salicide) is one of the key processes which have to be improved to meet the ITRS requirements for the future technological nodes. Nowadays, solid state reaction between thin metal layer (Ni1-yPty < 10nm) and a silicon substrate allows to decrease access resistances of transistor source & drain. The metal is currently deposited by physical vapor deposition method all over the wafer surface. Under heat treatment, metal reacts preferably with semiconductor areas rather than dielectrics ones. Then, unreacted metal layer is selectively etched with an appropriate acidic solution; only metal silicide remains.As new specifications (use of ultra-thin Ni-alloy,very low temperature process leading to partial salicidation, use of various additive metals ...)are required for advanced nodes (C20nm & C14nm), the capability to chemically remove the excess of metal on dielectric areas has to be investigated. In the clean room environment of CEA-LETI (Grenoble, France), the candidate will work on innovative wet chemistries to remove selectively the different metallic layers (Ni, Pd, NiCo, NiPd…). In a first time preliminary test will be conducted on sample in manual tank in order to check removal kinetic and global selectivity on structures devices… Based on several characterization techniques (TXRF, XRR, AFM, SEM, TEM, XRD…), residual additive interaction with dielectric and chemical mixture behavior towards the metal rich phase on silicided area (roughness, resistivity) will be studied. Different semi-conductor (Si, SiGe…) and dielectrics surfaces (SiO2, SixNy…) will be investigated. Afterwards the most promising selective processes will be selected to be installed on a fully automatic 300mm tool. Finally, best processes will be integrated on critical patterned wafer architectures for morphological and electrical characterizations.
Development of a Metal Supported Cell for Hydrogen production by High Temperature Steam Electrolysis
The development of Metal Supported Cells (MSC) for High Temperature Steam Electrolysis (HTSE) constitutes an interesting innovation able to reduce the degradation of this component under operation. An increase in the cell life time would be a valuable contribution to cost reduction and is able at positioning HTSE as an alternative process to other hydrogen production technologies. However, some progresses in the elaboration of MSCs are still required. Within the current process, functional ceramic layers of the MSC are joined to the metallic substrate at elevated temperature (> 1000 °C). Mismatch of the mechanical properties of the materials as well as the reducing conditions fixed by the metal substrate during sintering lead to MSCs having insufficient electrochemical performances. The post-doctorate aims, on the one hand, at obtaining a better understanding of the mechanisms that occur in the multilayer structure during sintering and, on the other hand, at proposing and testing technological solutions able to improve to reliability of MSC elaboration.
Droplets motion through modulation of surface energy gradient
Droplet motion through electro-wetting is nowadays largely studied and used in several systems and applications. In order to be useful, this technique needs an electrical field to monitor the droplet. For this post-doctoral fellowship, the main objective is to define an alternative method to the using of the electro-wetting technique in order to generate a droplet motion. The elaboration of surfaces with energy gradients conceived by thin film deposition or by laser ablation will be realized inside this study. The main difficulty is related to the patterns realization in order to obtain the appropriate hydrophilic/hydrophobic resolution. Apart from these “classical” techniques, an innovative method will be studied here by using switchable molecules. These molecules could modify the contact angle between a surface and a droplet, when acting on the potential of hydrogen (pH) or the wall temperature. For all the defined surfaces, the post-doctoral fellow will also analyze the coupling effect between the surface energy gradient and a thermal energy gradient on the droplet motion dynamics.
Porous layer integration for advanced temporary substrates
Double transfer of thin single crystalline processed layer can be very interesting for all technologies that require front and back side engineering of the silicon active film. With the increase of the electronical system complexity, this alternative technology can offer new opportunities to miniaturize the semiconductor devices. To fulfill such requirements, a recent alternative technology was developed at the CEA-LETI, based on the use of porous silicon substrates [1]. This new technology will be of a great interest for 3D integration, back-side imager but also MEMS or photovoltaics applications. This technology should now be validated at a larger scale, and we need to focus on all involved mechanisms such as the porous silicon layer rupture.
In a first place, the applicant should comprehend the specification of porous materials in thin film configuration, including elaboration steps and distinctive properties of transferred porous layers. Subsequently he/she may need to interact with Leti’s technological experts to determine process improvements to be implemented to reach pre-established specifications of desired prototypes. In order to evaluate and recommend appropriate materials and equipments, he/she may need to extensively focus on the behaviour of porous material under specific stress conditions such as chemical, thermal or mechanical solicitations. The purpose is to ensure compliance to Smart Cut or Smart stacking technologies that involve amongst others processes molecular bonding technology.
Later, the effort should be focused on the development of a specific technology to induce the mechanical separation inside the buried porous silicon layer. One line of approach would be to trigger the mechanical separation by ultrasound solicitation. Understanding the mechanisms of the splitting and characterising the resulting structures are part of the expected work to be completed in this project.
[1] A-S.Stragier et al., JECS,158 (5) H595-H599 (2011)
Modelling of interstitial cluster evolution in bcc metals after helium implantation
Under irradiation, structural materials inside nuclear reactors undergo changes in mechanical properties, which result from the formation of point defect clusters, such as cavities (clusters of vacancies) and interstitial dislocation loops (clusters of self-interstitial atoms). Understanding the formation processes of such clusters is thus of prime importance. Recently, three-dimensional interstitial clusters, known as C15 clusters, have been shown theoretically to be highly stable in iron [1]. In order to detect such clusters experimentally, an idea is to make them grow, as shown for dislocation loops after helium implantation [2].
This approach will be carried out experimentally in various bcc metals in the framework of the ANR project EPigRAPH, in collaboration with Chimie ParisTech, GEMaC and LPS.
In this project, the following modelling tasks will be performed by the postdoc:
- DFT calculations will be done to obtain the energetic properties of point defects and point defect clusters in the bcc metals envisaged in the project.
- These data will then be used to parameterize a kinetic model based on cluster dynamics [3]. This formalism is particularly well adapted to simulate the evolution of point defect clusters over long physical times.
The modelling work will be performed in close collaboration with another postdoc working on the experimental part.
[1] M. C. Marinica, F. Willaime, J.-P. Crocombette, Phys. Rev. Lett. 108 (2012) 025501
[2] S. Moll, T. Jourdan, H. Lefaix-Jeuland, Phys. Rev. Lett. 111 (2013) 015503
[3] T. Jourdan, G. Bencteux, G. Adjanor, J. Nucl. Mater. 444 (2014) 298
Automatic driving of a finite element software based upon a domain decomposition strategy. Application to ultrasonic non-destructive testing.
One the most important field of activity at the DISC (Department of Imaging and Simulation for Control) of CEA - LIST is to provide a comprehensive set of tools for modeling and simulation for Non-Destructive Testing (NDT). These tools are gathered within the computational platform CIVA. Most of the ultrasound models -- elaborated by the LSMA (research laboratory for Simulation and Modeling in Acoustics) -- are based upon semi-analytical methods. Although very efficient, these methods suffer from a loss of precision as soon as some critical phenomena (e.g. head waves or caustics) or some particular features of the material (e.g. flaws or heterogeneities ) appear in the control experiment. To circumvent these limitations, one of the field of research in the LSMA is to build coupling schemes between semi-analytical and numerical methods. Following this strategy, a computational software based upon high-order finite elements combined with domain decomposition strategies is developped in order to address 3D configurations. The work proposed here focuses on increasing the complexity of the configurations reachable within this coupling strategy. A typical example being the fluid-structure interaction in the case of flaws reaching the bottom of the material to control.
Electrochemical device for purifying hydrogen in a reformed gas
This project aims to establish a new research and development on purification devices for fuel reformers for hydrogen fuel cells. This work is of prime importance for fuel cell systems fed by different sources of hydrogen. Used in "power full" or "range extender" modes, the reformer and gas purification system are elements of the chain that have to be optimized.
Objective is to develop an electrochemical device for purifying the gas from a reformer whose basic principle is similar to that of a PEM electrolyzer. The gases from the reformer undergo a selective electrocatalytic oxidation to separate hydrogen and conventional pollutants directly power a fuel cell.
The project will focus on selection and characterization of catalysts electrocatalytic performance and the achievement of functional prototypes. These developments will assess the economic relevance of the device vis-à-vis other systems and identify areas of research to develop thereafter.
Fabrication and characterization of high thermal conductivity SiCf/SiC composites
SiCf/SiC ceramic matrix composites are foreseen candidates for structure materials and claddings in fast neutron reactor of 4th generation. However, their use may be limited because of their too low thermal conductivity in the operating conditions (< 10 W/mK).
SiCf/SiC ceramic matrix composites are now elaborated by chemical vapour infiltration (CVI). In order to improve their thermal conductivity (reduced porosity), it is planned to develop a hybrid elaboration process combining CVI and liquid routes.
The objective of this study is to determine the conditions of elaboration of a SiC matrix by liquid routes and then to characterize the thermo-mechanical behaviour of the hybrid composites, particularly in relation to CVI references.
Large-area processing and design of functional piezoelectric nanomaterials for flexible sensors and systems
CEA LETI develops innovative highly flexible strain sensors which exploit the piezoelectric properties of self-organized gallium nitride nanowires. The fabrication steps are basically: i) nanowire growth, ii) nanowire assembly, iii) encapsulation, iv) contacting. First demonstrators with small active area (1.5 cm²) have already been achieved using the Langmuir Blodgett (LB) technique for the assembly of nanowires. The present project is concerned with the scaling-up of the assembly process over large surface areas, as well as controlled patterning of nanowire assemblies in 1D and 2D by using an innovative CEA LITEN roll-to-roll technology called Boostream® which has the same functionalities as LB in its basic function.
The aim of the post doc is to develop a new building block for the Boostream® equipment enabling a controlled assembly of wires with a pre-defined design. The candidate will carry out studies to optimize the wire assembly, develop the process of film patterning and fabricate, integrate and characterize GaN nanowire piezoelectric transducers with dimensions of 15x15 cm².
More generally, this post doc will also provide the opportunity to develop a generic knowledge to manipulate micro or nano wires or fibers giving new solutions in various fields such as surface structuration, electronic skin, energy...