Plasma Etching development for the advanced nodes using SADP techniques
The miniaturization of the electronics components involves the development of new processes. Indeed, the 193nm immersion lithography alone does not permit anymore to achieve the dimensional requirements of the most advanced technological nodes (=10nm). Since the last 10 years, multi-patterning techniques have been developed to overcome the i193nm lithography limitations. Herein, we will study the « Self-Aligned Double Patterning » (SADP) technique that divides by two the initial pitch of the lithographical patterns. This technology relies on a conformal deposition of a dielectric film (spacer) over the initial patterns (mandrel). The spacers will be then used as a mask during the pattern transfer by plasma etching. The small targeted dimensions require a perfect control of the etching processes. However, the etching steps can damage the materials used herein leading to a dimension loss. One of the main challenge will be to control the etching steps and so the plasma-induced modification in order to satisfy the specifications (dimension, profile, material consumption, etch rate, uniformity…). Besides, the goal will be also to propose new SADP approaches allowing us to generate different type of patterns in order to produce planar FDSOI transistors, which is currently little reported in literature.
The challenges of this PhD ?
To develop innovative etching processes
To explore new couple of material (spacer/mandrel) and to propose an industrial integration flow that will be validated by electrical tests
To identify the technological obstacles and to propose solutions for overcoming them
To put in place a reliable characterization protocol in order to detect the physical and chemical modifications of the materials used and to accurately measure the final patterns’ dimensions
Sperm 3D - Male infertility diagnostic tool using holography for imaging and 3D tracking
Infertility is a growing problem in all developed countries. The standard methods for the diagnostic of male infertility examine the concentration, motility and morphological anomalies of individual sperm cells. However, one in five male infertility cases remain unexplained with the standard diagnostic tools.
In this thesis, we will explore the possibility to determine the male infertility causes from the detailed analysis of 3D trajectories and morphology of sperms swimming freely in the environment mimicking the conditions in the female reproductive tract. For this challenging task, we will develop a dedicated microscope based on holography for fast imaging and tracking of individual sperm cells. Along with classical numerical methods, we will use up-to date artificial intelligence algorithms for improving the imaging quality as well as for analysis of multi-dimensional data.
Throughout the project we will closely collaborate with medical research institute (CHU/IAB) specialized in Assisted Reproductive Technologies (ART). We will be examining real patient samples in order to develop a new tool for male infertility diagnosis.
Impact of plasma activation on reliability of Cu/SiO2 hybrid bonding integrations
In recent years, CEA-LETI emerged as a leading force in the development of advanced microelectronic manufacturing processes. A key focus has been on wafer-to-wafer Cu/SiO2 hybrid bonding (HB) process, an emerging technology increasingly employed for producing compact, high performance and multifunctional devices. Before bonding, a crucial surface activation step is necessary to enhance the mechanical strength of the assembled structures. Different approaches have been developed, and the most used in the industry is N2-plasma activation. However, this process remains controversial due to undesirable effects, the formation of Cu nodules at the bonding interface between particularly electrical pads and the passivation of Cu pads with chemical complexes. These issues can significantly compromise the electric properties and reliability of devices. In collaboration with STMicroelectronics and IM2NP, this PhD aims at studying the impact of plasma activation on Cu/SiO2 HB integrations.
Study of catalysis on stainless steels
The materials (mainly stainless steels) aging of the spent nuclear fuel reprocessing plant is the focus of an important R&D activity at CEA. The control of this aging will be achieved by a better understanding the corrosion mechanisms the stainless steels in nitric acid (the oxidizing agent used in the reprocessing steps).
The aim of the PhD is to develop a model of corrosion on a stainless steel in nitric acid as a function of temperature and the acid nitric concentration. This PhD represents a technological challenge because currently few studies exist on in situ electrochemical measurements in hot and concentrated nitric acid. The PhD student will carry out by coupling electrochemical measurements, chemical analyses (UV-visible-IR spectrometry...) and surfaces analyses (SEM, XPS,…). Based on these experimental results, a model will be developed, which will be incorporated in the future in a more global model of the industrial equipments aging of the plant.
The laboratory is specialized in the corrosion study in extreme conditions. It is composed of a very dynamic and motivated scientific team which has the habit to receive students.
Microwave Near Field Sensing in Heterogeneous Media
This thesis focuses on the development of microwave near-field sensing techniques for applications in biomedicine, agronomy, and geophysics. The primary objective is to design low-complexity algorithms that effectively solve complex inverse problems related to the characterization and detection of dielectric properties with various geometric distributions in heterogeneous media.
The candidate will begin by conducting a comprehensive review of existing radar-based and advanced signal processing methods. A precise physical model of microwave propagation in near-field conditions will be developed, serving as the foundation for new detection methods based on the concept of physics-driven iterative tomography. The ultimate goal is to formulate efficient algorithms suitable for real-time applications and validate them through experimental implementation. To achieve this, an evolving prototype setup will be developed, progressing from 2D media to more complex 3D scenarios.
This interdisciplinary project combines physical modeling, algorithm development, and practical experimentation. It presents an opportunity to advance the field of microwave imaging, with significant implications for biomedical and environmental applications.
Kinetics of the Melting Front in a Phase Change Material Used for Decay Heat Removal in an Innovative Nuclear Reactor
In the context of developing innovative sodium-cooled fast reactors (SFR), this PhD aims to explore the use of a phase change material (PCM) to remove residual power. The PCM studied in this project is Zamak, a metallic alloy that presents advantageous properties for such thermal applications. Some SFR designs incorporate passive safety systems intended to ensure the removal of residual power, which refers to the heat generated by delayed fission and radioactive decay of fuel isotopes after reactor shutdown. The use of PCM is a promising option, as they can absorb and store heat through a melting process and subsequently release it gradually during a solidification process.
The core of this PhD focuses on Computational Fluid Dynamics (CFD) modeling of the Zamak melting process and the scaling of this model for use in a system-size calculation tool. The main challenge lies in predicting the behavior of the melting front, its stability, and its impact on the kinetics of residual power removal. This melting front is influenced by numerous factors such as the wetting angle and the physico-chemical properties of the PCM-wall or PCM-surrounding gas interface, which will be examined throughout the thesis. The research will thus involve developing a CFD model that integrates these aspects, using a porous enthalpy approach, allowing predictive simulations of the PCM's behavior in the residual power removal system. A scaling analysis will then be conducted.
The PhD candidate will be part of a research team on innovative reactors at the IRESNE institute located at the CEA Cadarache site. Career opportunities after the thesis include academic research, R&D, and the nuclear industry, as well as sectors utilizing PCM technologies.
High-isolation power supply
With the rapid evolution of technologies and the growing challenges of miniaturization and resource management, power converters are facing ever more stringent performance requirements. To meet these needs, the use of wide-bandgap semiconductors such as SiC (silicon carbide) and GaN (gallium nitride) is becoming increasingly common. These materials significantly increase the switching speed of converters, reducing losses and improving efficiency.
However, this switching speed brings additional challenges: the steepness of the switching edges can cause stray currents that interfere with switch controls. To counter these undesirable effects, it is necessary to use switch drivers offering a high level of insulation. The traditional solution is based on high-frequency magnetic transformers, but these devices are expensive, take up a lot of space and offer limited insulation.
Thesis objective: the aim of this thesis is to design a new solution for powering wide-gap component drivers, by replacing magnetic transformers with piezoelectric transformers. This innovative approach aims to reduce costs, space requirements and improve the overall efficiency of power conversion systems.
Supervision and ressources: the selected candidate will work as part of a leading-edge research team, renowned for its expertise in the field of power conversion using piezoelectric resonators. The team has the resources and know-how to support the development and validation of this innovative technology.
Identification versus anonymisation from an embedded client operating on a blockchain
The first worldwide deployment of a blockchain dates back to 2010 with Bitcoin, which introduced a completely digital monetary system and a crypto-currency, bitcoin. Within Bitcoin, all transactions are publicly accessible and traceable, which should generate trust between stakeholders. However, the traceability of transactions, and ultimately of the crypto-currency, does not imply the traceability of users authenticated by an account address, or more precisely by a set of account addresses that are independent of each other. In this context, it can be complex to trace the individuals or legal entities owning the crypto-currency.
Crypto-currency is not the only use case supported by blockchain technology. The deployment of Ethereum in 2014, based on the use of smart contracts, opened up many other uses, in particular the protection of identifying data. In this area, the need for traceability versus furtivity can vary greatly from one use case to another. For example, on a blockchain that records the access of a worker owning an employment certificate to an industrial site, no information enabling the worker to be identified or his activity to be traced should appear. On the other hand, in the case of data collected by IoT sensors and processed by remote Edge devices, traceability of data and processing is desirable.
The thesis proposes to study different techniques for tracing digital assets on a blockchain, for stealthing their owners, and offering the possibility of auditing and identification by an authorised body. The aim is to build embedded devices, Edge or personal possibly embedding artificial intelligence, secured by hardware components, integrating different cryptographic solutions and account, data or identity wallet structures to meet the needs of the different use cases envisaged.
Strain field imaging in semiconductors: from materials to devices
This subject addresses the visualization and quantification of deformation fields in semiconductor materials, using synchrotron radiation techniques. The control of the deformation is fundamental to optimize the electronic transport, mechanical and thermal properties.
In a dual technique approach we will combine the determination of the local deviatoric strain tensor by scanning the sample under a polychromatic nano beam (µLaue) and a monochromatic full field imaging with a larger beam (dark field x ray microscopy, DFXM).
New developments of the analysis will be focused on 1/ the improvement of the accuracy and speed of the quantitative strain field determination, 2/ the analysis of strain gradient distributions in the materials, and 3/ the determination of the dynamic strain field in piezoelectric materials through stroboscopic measurements. To illustrate these points, three scientific cases corresponding to relevant microelectronic materials of increasing complexity will be studied:
1- Static strain fields surrounding metallic contacts, such as high-density through silicon vias (TSV) in CMOS technology.
2- Strain gradients in Ge/GeSn complex heteroepitaxial structures with compositional variations along the growth direction.
3- Dynamical strain in LiNbO3 surface acoustic wave resonators with resonance frequency in the MHz range bulk
Establishing this approach will mean moving a step forward towards more efficient microelectronics and strain engineering.
Advanced functions for monitoring power transistors (towards greater reliability and increased lifespan of power converters for energy)
In order to increase the power of electronic systems, a common approach is to parallelize components within modules. However, this parallelization is complicated by the dispersion of transistor parameters, both initial and post-aging. Fast switching of Wide Bandgap (WBG) semiconductors components often requires slowdowns to avoid over-oscillation and destruction.
An intelligent driving scheme, including adjusted control, control of internal parameters of circuits and devices, as well as a feedback loop, could improve reliability, service life and reduce the risk of breakage.
The objectives of the thesis will be to develop, study and analyze the performance of control and piloting functions of power components, in silicon carbide (SiC) or gallium nitride (GaN), which could ultimately be implemented in a dedicated integrated circuit (ASIC type).
This thesis subject aims to solve critical problems in the parallelization of power components, thus contributing to eco-innovation by increasing the lifespan of power modules.