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Thesis
Home   /   Thesis   /   Multiscale 3D Characterization of Nanodevices Using EDX Tomography and Electron Ptychography

Multiscale 3D Characterization of Nanodevices Using EDX Tomography and Electron Ptychography

Advanced nano characterization Engineering sciences Instrumentation Technological challenges

Abstract

The increasing complexity of nanodevices requires multiscale 3D characterization techniques spanning from the nanometer to the atomic scale. STEM-EDX tomography provides three-dimensional elemental mapping at the nanometer scale. Recent deep learning-based approaches have achieved near-isotropic spatial resolution of approximately 5 nm in specimens 60–100 nm thick. Electron ptychography offers complementary capabilities for atomic-resolution structural characterization. This PhD aims to develop a correlative methodology combining both techniques on the same specimen. STEM-EDX tomography will first be performed on relatively thick TEM lamellae. The specimens will subsequently be thinned to a target thickness below 30 nm for 4D-STEM acquisition. Multislice electron ptychography will provide depth-resolved structural information. Simulations will be used to optimize experimental conditions and acquisition parameters. EDX spectral processing and limited-angle tomographic reconstruction methods will be optimized. Ptychographic reconstruction algorithms will be evaluated in terms of resolution, robustness, and sensitivity to light elements. A major challenge will be the spatial registration of chemical and structural volumes before and after specimen thinning. Reconstruction accuracy and limitations will be assessed using simulations and reference specimens. The methodology will be applied to phase-change memory (PCM) devices and InGaN-based nano-emitters. The ultimate goal is to establish a correlative 3D characterization approach linking chemical composition, atomic structure, and nanodevice properties.

Laboratory

Département Ingénierie des Procédés, Technologies Emergentes et Caractérisation
Service d'Expertise et de Support pour l'Analyse des Matériaux
Laboratoire de PRéparation, Imagerie et Microscopie Electronique
Université Grenoble Alpes
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