Microelectronics extends its range of applications via the micro-systems with high level of integration including sensors, energy scavenger, and communication modules. Medical implants such as pacemakers and defibrillators medical implants, drug dispensers, intra-cranial probes are many possible applications for these modules. The use of glass offers a wide field of investigation. Moreover, recent innovations for the glass material (interconnections, thinning, and functionalization) reinforce its relevance to the medical field: biocompatibility, stability, transparency, and potentially lower cost.
The objective of this work is to design and validate technological steps to integrate high level of microsystems encapsulated in glass material.