Materials imperfections in superconducting quantum circuits—in particular, two-level-system (TLS) defects—are a major source of decoherence, ultimately limiting the performance of qubits. Thus, identifying the microscopic origin of possible TLS defects in these devices and developing strategies to eliminate them is key to superconducting qubit performance improvement. This project proposes an original approach that combines the passivation of the superconductor’s surface with films deposited by Atomic Layer Deposition (ALD), which inherently have lower densities of TLS defects, and thermal treatments designed to dissolve the initially present native oxides. These passivating layers will be tested on 3D Nb resonators than implemented in 2D resonators and Qubits and tested to measure their coherence time. The project will also perform systematic material studies with complementary characterization techniques in order to correlate improvements in qubit performances with the chemical and crystalline alteration of the surface.